Ultra Clean Processing of Silicon Surfaces V: Proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (Ucpss 2002) . September 2002 (Solid State Phenomena)
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Ultra Clean Processing of Silicon Surfaces
~EN PB USISBN: 9783908450788 bzw. 3908450780, vermutlich in Englisch, Trans Tech Publications, Limited, Taschenbuch, gebraucht.
Von Händler/Antiquariat, ThriftBooks [54239181], AURORA, IL, U.S.A.
A copy that has been read, but remains in excellent condition. Pages are intact and are not marred by notes or highlighting, but may contain a neat previous owner name. The spine remains undamaged. At ThriftBooks, our motto is: Read More, Spend Less.
A copy that has been read, but remains in excellent condition. Pages are intact and are not marred by notes or highlighting, but may contain a neat previous owner name. The spine remains undamaged. At ThriftBooks, our motto is: Read More, Spend Less.
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Ultra Clean Processing of Silicon Surfaces V: Proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (Ucpss 2002) . September 2002 (Solid State Phenomena) (2003)
~EN PB USISBN: 9783908450788 bzw. 3908450780, vermutlich in Englisch, Scitec Publications, Ltd. Taschenbuch, gebraucht.
Von Händler/Antiquariat, HPB-Dallas [54223947], Dallas, TX, U.S.A.
Item may show signs of shelf wear. Pages may include limited notes and highlighting. May include supplemental or companion materials if applicable. Access codes may or may not work. Connecting readers since 1972. Customer service is our top priority.
Item may show signs of shelf wear. Pages may include limited notes and highlighting. May include supplemental or companion materials if applicable. Access codes may or may not work. Connecting readers since 1972. Customer service is our top priority.
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Ultra Clean Processing of Silicon Surfaces V: Proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (Ucpss 2002) . September 2002 (Solid State Phenomena) (2003)
DE PB USISBN: 9783908450788 bzw. 3908450780, in Deutsch, Scitec Publications, Ltd. Taschenbuch, gebraucht.
Von Händler/Antiquariat, HPB-Dallas [54223947], Dallas, TX, U.S.A.
Item may show signs of shelf wear. Pages may include limited notes and highlighting. Includes supplemental or companion materials if applicable. Access codes may or may not work. Connecting readers since 1972. Customer service is our top priority.
Item may show signs of shelf wear. Pages may include limited notes and highlighting. Includes supplemental or companion materials if applicable. Access codes may or may not work. Connecting readers since 1972. Customer service is our top priority.
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/ Mertens / Meuris | Ultra Clean Processing of Silicon Surfaces VI | Trans Tech Publications | 2003
~EN NWISBN: 9783908450788 bzw. 3908450780, vermutlich in Englisch, Trans Tech Publications, neu.
The issues addressed by the Sixth International Symposium on the Ultra Clean Processing of Silicon Surfaces included all aspects of ultra-clean Si-technology, cleaning and contamination control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing. This covered studies of Si-surface chemistry and topography and its relationship to device performance and process yield, cleaning in relationship to new gate stacks, cleaning at the interconnect level, resist stripping and polymer removal, cleaning and contamination control of various new materials, wafer backside cleaning and cleaning following Chemical-Mechanical-Polishing (CMP). Judging from the large number of papers dealing with wet cleaning processes, it is clear that this is still the dominant cleaning technology at the moment. Various papers discussed simplified cleaning by the use of chelating additives, and single-wafer wet cleaning, which is expected to replace the more standard multi-step batch-type cleaning systems, in various applications, in the future. Several contributions dealt with new materials introduced into current process research and development: such as Cu, and especially (porous) low-k material, as well as high-k and metal gate stacks. Substantial progress had also been made in understanding the effects of megasonics, and in the area of cleaning following Chemical-Mechanical Polishing (CMP). Last, but not least, an encouraging number of contributions were presented on the relatively new topic of supercritical CO2 cleaning. Altogether, the 76 contributions presented at the symposium represent a timely and authoritative assessment of the state-of-the-art of this very interesting and essential field.
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Ultra Clean Processing of Silicon Surfaces V: Proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces Ucpss . September 2002 (Solid State Phenomena) (2003)
EN PB USISBN: 9783908450788 bzw. 3908450780, in Englisch, 320 Seiten, Trans Tech Publications Ltd, Taschenbuch, gebraucht.
Lieferung aus: Deutschland, Versandfertig in 6 - 10 Werktagen, Versandkostenfrei. Tatsächliche Versandkosten können abweichen.
Von Händler/Antiquariat, ErgodeBooks Ships From USA.
Die Beschreibung dieses Angebotes ist von geringer Qualität oder in einer Fremdsprache. Trotzdem anzeigen
Von Händler/Antiquariat, ErgodeBooks Ships From USA.
Die Beschreibung dieses Angebotes ist von geringer Qualität oder in einer Fremdsprache. Trotzdem anzeigen
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Ultra Clean Processing of Silicon Surfaces V: Proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces Ucpss . September 2002 (Solid State Phenomena) (2003)
EN PB USISBN: 9783908450788 bzw. 3908450780, in Englisch, 320 Seiten, Heyns, Marc, Mertens, Paul, Meuris, Marc, Trans Tech Publications Ltd, Taschenbuch, gebraucht.
Lieferung aus: Vereinigte Staaten von Amerika, Gewöhnlich versandfertig in 6 bis 10 Tagen. Tatsächliche Versandkosten können abweichen.
Von Händler/Antiquariat, ErgodeBooks Ships From USA.
Trans Tech Publications Ltd, Taschenbuch, Publiziert: 2003-07-01T00:00:01Z, Produktgruppe: Book.
Von Händler/Antiquariat, ErgodeBooks Ships From USA.
Trans Tech Publications Ltd, Taschenbuch, Publiziert: 2003-07-01T00:00:01Z, Produktgruppe: Book.
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